Plasma Equipment AL-Series

AL 36 table top

  Process Chamber (DxWxH):  350x320x320 mm (AI)
  Dimensions (DxWxH):  680x630x650 mm
 Pasma source:  2.45GHz, up to 1200 W
  Pump system:  up to 15-65 m3/h

 

AL 76 compact/ tabletop

  Process chamber(DxWxH):  480x400x550 mm (AI) 
  Dimensions (c) (DxWxH):         800x1050x1800 mm
  Dimensions (t) (DxWxH):   780x770x780
  Plasma source:  2.45GHz, up to 1200 W
  Pump system:  up to 250 m3/h (intergated)